Jsi@Jsits.com
yourmook@lycos.co.kr

Tel:031-479-4211/2
Fax:031-479-4213

JS International Co.
Nuarc Korea Co.

NuArc의 FT26MH 플립탑 노광시스템은1000와트 메탈할라이드 고압수은등을 사용해
신속하고 선명한 고해상도 노광을 가능케하는 리소그래피 용 노광시스템입니다.

램프는 즉각점등방식의 셔터리스기능으로 포토센서티브(감광성)시료에 이상적인 성능을 보여줍니다.
디지털 LED적산광량계는 정확한 노광의 반복작업을 가능하게 해주며, 고효율의 에너지 절감용
파워 서플라이를 사용해 양산용으로 사용시 에너지 절감효율이 우수합니다.
가능한 노광사이즈는 58 x 69 CM이며

Controller/Integrator
LED readout
Design & Construction
Attractive, compact design
Enclosed light cabinet prevents accidental exposure of sensitized products
Gas lift-arm assisted vacuum frame opening
Heavy-duty all-steel cabinet
Molded one-piece blanket
Rigid tubular aluminum glass frame
Electrical Requirements*
110v, 1 phase, 13 amps, 60 Hz
Light Source
1000-watt lamp
Instant-start lamp and rapid recovery power supply provide shutterless operation
Instant-start lamp eliminates warmup and idling times, saving energy
Multi-spectrum metal-halide lamp
Size (HxWxD)
37?x 34?x 34?(94 x 86 x 86 cm)
Requires 3?(8 cm) of clearance at rear for ventilation
Vacuum System
Heavy-duty maintenance-free vacuum pump for rapid drawdown
Support
24-hour hotline
Training
Access to the M&R/NuArc Training Centers
Warranty
One-year limited warranty excluding glass and lamps

Electrical Requirements*
208/230v, 1 phase, 9.4/7.7 amps, 60 Hz
208/230v, 1 phase, 7.4/6.7 amps, 50 Hz
Filters
Kokomo Filter (GW126)
Replacement Lamp
NP 80

* If incoming voltage differs from the voltage(s) listed in this brochure, calculate amperage accordingly
** Optional
*** Requires 3" (8 cm) of clearance at rear for ventilation