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Jsi@Jsits.com
yourmook@lycos.co.kr
Tel:031-479-4211/2
Fax:031-479-4213
JS International Co.
Nuarc Korea Co.
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Nuarc의 인스턴트-스타트 시리즈는 리소그래피용 고성능 노광시스템입니다.
3000와트와 6000와트 메탈할라이드 고압수은등 두가지 모델이 있으며 싱글채널의 적산광량계가
기본적으로 장착되어 있습니다.
이두모델 모두 리소그래피용으로 탁월한 성능을 보여주며 고효율의 즉각점등방식을 적용해
예열이 필요하지 않아 시간및 에너지절감효과가 뛰어납니다.
셔터-프리 방식으로 순간적인 온, 오프가 가능하며 싱글베큠프레임모델과 더블베큠프레임 모델이 있습니다.
양면형 플립탑 모델은 작업자가 한쪽면을 노광하면서 다른면을 노광준비시킬수 있어 끊김없이
연속적인 노광을 가능하게 합니다.
Controller/Integrator
LED readout
Design & Construction
Attractive, compact design
Enclosed light cabinet prevents accidental exposure of sensitized products
Gas lift-arm assisted vacuum frame opening
Heavy-duty all-steel cabinet
High efficiency cooling system
Molded one-piece blanket
NuLoc?vacuum frame latch featured on 40?(102 cm) models
Rigid tubular aluminum glass frame
Electrical Requirements*
3000-watt: 208/230v, 1 phase, 14.0/12.5 amps, 60 Hz
6000-watt: 208/230v, 1 phase, 27.0/21.0 amps, 60 Hz
Light Source
6000 or 3000-watt multi-spectrum metal halide lamp
Exposure system saves energy by eliminating warmup and idling times
Instant-start lamp and rapid recovery power supply provide shutterless
operation
Single channel Integrator
Size (HxWxD)***
FT26 models: 39?x 35?x 41?(99 x 89 x 104 cm)
FT32 models: 42?x 43?x 53?(107 x 109 x 135 cm)
FT40 models: 43?x 51?x 56?(109 x 130 x 142 cm)
Vacuum System
Heavy-duty maintenance-free vacuum pump for rapid drawdown
Support
24-hour hotline
Training
Access to the M&R/NuArc Training Centers
Warranty
One-year limited warranty excluding glass and lamps
Controller/Integrator
C1200 Electronic Exposure Control includes precision integrator and eight
memory channels for accurate, repeatable exposures
Electrical Requirements*
3000-watt: 208/230v, 1 phase, 16.0/14.5 amps, 50 Hz
6000-watt: 208/230v, 1 phase, 29.0/27.8 amps, 50 Hz
Replacement Lamps
3,000-watt models: HT121 or HT162
6,000-watt models: KT38 or PM78
| Model |
Wattage |
Usable Area |
Size (HxWxD)*** |
Electrical Requirements* |
Shipping Weight |
FT26V3UP
Single-sided |
3000 |
23" x 27"
(58 x 69 cm) |
39" x 35" x 41"
(99 x 89 x 104 cm) |
208/230v, 1 phase
16/13 amps, 60 Hz
208/230v, 1 phase
20/17 amps, 50 Hz** |
365 lbs
(166 kg) |
FT32V3UP
Single-sided |
3000 |
28" x 32"
(71 x 81 cm) |
42" x 43" x 53"
(107 x 109 x 135 cm) |
208/230v, 1 phase
17/14 amps, 60 Hz
208/230v, 1 phase
20/17 amps, 50 Hz** |
690 lbs
(313 kg) |
FT40V3UP
Single-sided |
3000 |
33" x 41.5"
(84 x 106 cm) |
43" x 51" x 56"
(109 x 130 x 142 cm) |
208/230v, 1 phase
17/14 amps, 60 Hz
208/230v, 1 phase
20/17 amps, 50 Hz** |
780 lbs
(354 kg) |
FT26V3UPNS
Double-sided |
3000 |
23" x 27"
(58 x 69 cm) |
39" x 35" x 41"
(99 x 89 x 104 cm) |
208/230v, 1 phase
18/15 amps, 60 Hz
208/230v, 1 phase
17/14 amps, 50 Hz** |
400 lbs
(181 kg) |
FT32V3UPNS
Double-sided |
3000 |
28" x 32"
(71 x 81 cm) |
42" x 43" x 53"
(107 x 109 x 135 cm) |
208/230v, 1 phase
18/15 amps, 60 Hz
208/230v, 1 phase
20/17 amps, 50 Hz** |
740 lbs
(336 kg) |
FT40V3UPNS
Double-sided |
3000 |
33" x 41.5"
(84 x 106 cm) |
43" x 51" x 56"
(109 x 130 x 142 cm) |
208/230v, 1 phase
18/15 amps, 60 Hz
208/230v, 1 phase
20/17 amps, 50 Hz** |
850 lbs
(386 kg) |
FT40V6UP
Single-sided |
6000 |
33" x 41.5"
(84 x 106 cm) |
43" x 51" x 56"
(109 x 130 x 142 cm) |
208/230v, 1 phase
32/25 amps, 60 Hz
208/230v, 1 phase
35/24 amps, 50 Hz** |
850 lbs
(386 kg) |
FT40V6UPNS
Double-sided |
6000 |
33" x 41.5"
(84 x 106 cm) |
43" x 51" x 56"
(109 x 130 x 142 cm) |
208/230v, 1 phase
33/26 amps, 60 Hz
208/230v, 1 phase
38/31 amps, 50 Hz** |
920 lbs
(417 kg) |
| Electrical Requirements* |
Shipping
Weight |
110v, 13 amps, 1 phase, 60 Hz
208/230v, 9.4/7.7 amps, 1 phase, 60 Hz**
208/230v, 7.4/6.7 amps, 1 phase, 50 Hz** |
370 kg
(816 lbs) |
* If incoming voltage differs from the voltage(s)
listed in this brochure, calculate amperage accordingly
** Optional
*** All models require 3" (8 cm) clearance on each
side for ventilation
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