Jsi@Jsits.com
yourmook@lycos.co.kr

 

Tel:031-479-4211/2
Fax:031-479-4213

JS International Co.
Nuarc Korea Co.

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 



 

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exposure systems
exposure lamps
exposure systems



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NuArc의 System 631플립탑 노광시스템은 메탈할라이드 고압수은등을 사용하며
8채널 적산광량계가 장착돼 있어 신속하게 고해상도의 노광을 가능케해주는
리소그래피용 노광시스템입니다.

6000,3000,1000와트급 모델이 있으며 양면형 플립탑 모델은작업자가 한쪽면을 노광하는 동안
다른면의 노광준비작업이 가능해 끊김없이 연속적인 양면노광이 가능합니다.

프레임 개방시는 한손으로 작업이 가능할정도로 간단히 할수 있습니다.

NuArc의 새로개발된 비례온도콘트롤시스템( Proportional Temperature Control-PTC)은
획기적으로 에너지 소모 및 열발산을 감소시켜주며 적당한 램프온도 유지.고효율의 램프출력등을
가능하게 해줍니다.

NuArc의 특허인 인스턴트 베큠시스템은 프레임당 2개의 펌프를 사용하는데 하나의 펌프는
진공을 위한 공기흡입용 주펌프로 사용되고 다른하나는 완벽한 접착을 위한 추가압력용으로
사용됩니다.

Controller/Integrator
Eight-channel light integrator for exposure control
LED readout
Design & Construction
Attractive, compact design
Convenient 9?(23 cm) high operator platform
Enclosed light cabinet prevents accidental exposure of sensitized products
Gas lift-arm assisted vacuum frame opening
Heavy-duty all-steel cabinet
High efficiency cooling system
NuLoc?vacuum frame latch
Rigid tubular aluminum glass frame
Electrical Requirements
Non-Stop: 208/230v, 1 phase, 37.5/29.0 amps, 60 Hz
Single-Sided: 208/230v, 1 phase, 32.7/24.2 amps, 60 Hz
Exposure Area (maximum usable area):
33?x 41.5?(84 x 105 cm)
Light Source
Intensity adjusts to 6000, 3000, & 1000 watts
Multi-spectrum metal-halide lamp
Proportional Temperature Control (PTC) reduces ambient heat during daily operation, reduces energy consumption, and improves control over lamp operating temperature
Removable reflector for easy lamp replacement
Size (HxWxD)
47?x 51?x 56?(119 x 130 x 142 cm)
Dimensions do not include 9?(23 cm) high operator platform
Requires 3?(8 cm) of clearance on each side for ventilation
Vacuum System
Heavy-duty maintenance-free vacuum pump for rapid drawdown
Support
24-hour hotline
Training
Access to the M&R/NuArc Training Centers
Warranty
One-year limited warranty excluding glass and lamps

Controller/Integrator
Automatically selects vacuum time, exposure time, filters, and photo detectors (included with NuVac option)
Electrical Requirements
Non-Stop: 208/230v, 1 phase, 39.0/28.3 amps, 50 Hz
Single-Sided: 208/230v, 1 phase, 44.7/33.8 amps, 50 Hz
Exposure Area (maximum usable area):
With optional NuVac Vacuum: 30?x 40?(76 x 101 cm)
Filters
Motorized Kokomo & Clearing Filter (MH195)
NuVac?Instant Vacuum System
Assures highest resolution, intimate contact, and perfect registration in seconds
Automatically creates channels that act as bleeder strips to evacuate air swiftly and systematically
Available on two-sided units
Patented (U.S. Patent No. 4,935,773)
Replacement Lamps
LY33
MH153

Model Wattage Usable Area
(Standard Vacuum)
Usable Area
(NuVac Option)
Size
(HxWxD)***
FT40APR
Single-Sided
6000, 3000, 1000 33" x 41.5"
(84 x 105 cm)
30" x 40"
(76 x 101cm)
47" x 51" x 56"
(119 x 130 x 142 cm)
FT40APRNS
Two-sided
6000, 3000, 1000 33" x 41.5"
(84 x 105 cm)
30" x 40"
(76 x 101cm)
47" x 51" x 56"
(119 x 130 x 142 cm)

Electrical Requirements* Shipping
Weight
(Standard)
Shipping
Weight
(With NuVac)
208/230v, 1 phase, 32.7/24.2 amps, 60 Hz
208/230v, 1 phase, 39.0/28.3 amps, 50 Hz**
1000 lbs
(454 kg)
1040 lbs
(472 kg)
208/230v, 1 phase, 37.5/29.0 amps, 60 Hz
208/230v, 1 phase, 44.7/33.8 amps, 50 Hz**
1100 lbs
(499 kg)
1180 lbs
(536 kg)


* If incoming voltage differs from the voltage(s) listed in this brochure, calculate amperage accordingly
** Optional
*** All models require 3" (8 cm) clearance on each side for ventilation